Thin film processing

Beneq TFS 200
Atomic Layer Deposition
e-beam evaporator Balzers
e-beam evaporator for various materials
RIE-CVD
Reactive Ion Etching and Chemical Vapor Deposition
ICP-RIE
Reactive Ion Etching with Inductively Coupled Plasma
e-beam evaporator UHV
e-beam evaporator for various metals, ultra high vacuum