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Cryogenics
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Lithography tools
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Photolithography
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Nanoscience Center
Lithography tools
Photolithography
UV mask aligner
UV mask aligner
Key facts
Status
Available
Location
NSC Cleanroom
Is resource specific training required?
Yes
Administrator contact info
Name
Email
Phone
Kimmo Kinnunen
kimmo.m.kinnunen@jyu.fi
+358408054790
Tarmo Suppula
tarmo.i.suppula@jyu.fi
+358504413691
Resource information
Manufacturer
Karl Suss
Model
MJB 3
Description
It's a mask aligner for UV photolithography.
Properties
TBD
Image(s)
Host unit
Nanotiedekeskus
Contact information
Name
Email
Phone
Kimmo Kinnunen
kimmo.m.kinnunen@jyu.fi
+358408054790
Tags
UV, mask aligner, cleanroom, lithography, photolithography
Terms of use
Availability
24/7
Do reservations require approvals from administrators?
No
Additional information
Attachments
Organization
Concise description
UV mask aligner
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