Jyväskylä University - Device Booking System

Key facts

Status

Available

Location

NSC Cleanroom

Is resource specific training required?

Yes

Administrator contact info

Name	Email	Phone
Kimmo Kinnunen	kimmo.m.kinnunen@jyu.fi	+358408054790

Resource information

Additional information

Attachments

Organization

Concise description

Reactive Ion Etching with Inductively Coupled Plasma

ICP-RIE