e-beam evaporator for "dirty" materials not suitable for UHV evaporator.

E-beam evaporation of various metals (Au, Ag, Al, Bi, Cu, Cr, Ge, Mn, Ni, Pt, Ti…) and insulators (SiO, SiO2, AlOx). Tunnel junction processing by oxidation between evaporations.

• Five pockets linear.
• Chamber walls heated/cooled with water circulation.
• Sample holder can be tilted and rotated.
• Deposition thickness monitored by Inficon Thickness Monitor.

Telemark TT-3 electron gun

4-7 kV voltage

Max current 750 mA