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Cryogenics
Lithography tools
Electron beam lithography
Helium Ion Microscope
Photolithography
Thin film processing
Microscopy
Nanoscopy
Spectroscopy
Nanoscience Center
Lithography tools
Thin film processing
Beneq TFS 200
Beneq TFS 200
Key facts
Status
Available
Location
NSC Cleanroom
Is resource specific training required?
Yes
Administrator contact info
Name
Email
Phone
Kimmo Kinnunen
kimmo.m.kinnunen@jyu.fi
+358408054790
Resource information
Manufacturer
Beneq
Web link
https://beneq.com/tfs200/?_gl=1*14sfanb*_up*MQ..*_gs*MQ..
Model
TFS 200
Description
Atomic layer deposition
Properties
Processes available: <TBD> (contact us)
Image(s)
Host unit
Nanotiedekeskus
Contact information
Name
Email
Phone
Kimmo Kinnunen
kimmo.m.kinnunen@jyu.fi
+358408054790
Sami Kinnunen
sami.a.kinnunen@jyu.fi
Tags
ALD, beneq, atomic layer deposition, thin film
Terms of use
Availability
24/7
Do reservations require approvals from administrators?
No
Additional information
Attachments
Organization
Concise description
Atomic Layer Deposition
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