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Cryogenics
Laser-setups
Lithography tools
Electron beam lithography
Helium Ion Microscope
Photolithography
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Thin film processing
Microscopy
Nanoscopy
Spectroscopy
Nanoscience Center
Lithography tools
Electron beam lithography
Voyager SEM
Voyager SEM
Key facts
Status
Available
Location
NSC Cleanroom
Room
YN010.6
Is resource specific training required?
Yes
Administrator contact info
Name
Email
Phone
Kimmo Kinnunen
kimmo.m.kinnunen@jyu.fi
+358408054790
Andreas Johansson
andreas.johansson@jyu.fi
Resource information
Manufacturer
Raith
Web link
https://raith.com/products/voyager/
Model
Voyager
Image(s)
Host unit
Nanotiedekeskus
Tags
SEM, EBL, e-beam, electron beam
Terms of use
Availability
24/7
Do reservations require approvals from administrators?
No
Additional information
Attachments
Organization
MOTD
Note: possible problem with modes missing after some software problems. Waiting for Raith's reply. Check with Olli or Geng if you need to pattern before the problem is resolved.
Concise description
Electron beam lithography tool
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